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Germanium Tetrafluoride

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Germanium Tetrafluoride (GeF4) is a kind of fluoride of germanium with molecular weight of 148.63, it is colorless gas with pungent odor of garlic, it reacts with water to generate a lot of white smoke in the air. Germanium tetrafluoride is used for doping and ion implantation in the semiconductor industry. Combined with ethylsilane gas, germanium tetrafluoride can be used to produce Si-Ge microcrystals on glass substrates.
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