Low Quality High Quality Hexafluoroethane

$9999

≥100
Ton

Incoterm:

FOB,CIF,DDP

Min. Order:

100 Ton

Transportation:

Ocean

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Product Description

Product Attributes
Supply Ability & Additional Information
Packaging & Delivery

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Overview

Product Attributes

Model No.: Hexafluoroethane

Supply Ability & Additional Information

Transportation: Ocean

Incoterm: FOB,CIF,DDP

Packaging & Delivery

Selling Units:: Ton

Hexafluoroethane (C2F6), also known as perfluoroethane, is a kind of colorless, odorless, non-flammable inert gas. Its melting point is 100.6 ℃, boiling point is 78.2 ℃, slightly soluble in water. Due to its non-toxic, odorless and high stability, hexafluoroethane is widely used in the semiconductor manufacturing process. Hexafluoroethane, as a dry etchant, has the advantages of very small edge-side etching, high etching rate and high accuracy, which can meet the requirements of semiconductor manufacturing process for small linewidth.

Hexafluoroethane Quality Specification：

Items	单位 Unit	Indexs
C2F6	Vol.%	≥99.999
O2+Ar	Vol.ppm	＜1
N2	Vol.ppm	＜5
CO	Vol.ppm	＜0.5
CO2	Vol.ppm	＜0.5
H2	Vol.ppm	＜0.5
Halohydrocarbon	Vol.ppm	＜5
CH4	Vol.ppm	＜1
H2O	Vol.ppm	＜2
Acidity（Measured by HF）	Wt. ppm	＜0.1
Total impurity content	Mol.ppm	≤10

Application：

Electronic grade hexafluoroethane is mainly used in the manufacturing process of semiconductor materials and semiconductor devices as etching agent and cleaning agent, as well as insulation gas and high dielectric strength coolant.

Packaging and storage：
Hexafluoroethane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.

Product Categories : Semiconductor Process Materials > Hexafluoroethane Semiconductor Process Materials

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