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Shandong Zhongshan Photoelectric Materials Co., Ltd

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Shandong Zhongshan Photoelectric Materials Co., Ltd
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HomeProductsSemiconductor Process MaterialsHexafluoroethaneLow Quality High Quality Hexafluoroethane

Low Quality High Quality Hexafluoroethane

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Model No.Hexafluoroethane

Hexafluoroethane (C2F6), also known as perfluoroethane, is a kind of colorless, odorless, non-flammable inert gas. Its melting point is 100.6 ℃, boiling point is 78.2 ℃, slightly soluble in water. Due to its non-toxic, odorless and high stability, hexafluoroethane is widely used in the semiconductor manufacturing process. Hexafluoroethane, as a dry etchant, has the advantages of very small edge-side etching, high etching rate and high accuracy, which can meet the requirements of semiconductor manufacturing process for small linewidth.

Hexafluoroethane Quality Specification:

Items 单位 Unit Indexs
C2F6 Vol.% ≥99.999
O2+Ar Vol.ppm <1
N2 Vol.ppm <5
CO Vol.ppm <0.5
CO2 Vol.ppm <0.5
H2 Vol.ppm <0.5
Halohydrocarbon Vol.ppm <5
CH4 Vol.ppm <1
H2O Vol.ppm <2
Acidity(Measured by HF) Wt. ppm <0.1
Total impurity content Mol.ppm ≤10

Electronic grade hexafluoroethane is mainly used in the manufacturing process of semiconductor materials and semiconductor devices as etching agent and cleaning agent, as well as insulation gas and high dielectric strength coolant.

Packaging and storage:
Hexafluoroethane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.

Looking for ideal Semiconductor Materials Etching Manufacturer & supplier ? We have a wide selection at great prices to help you get creative. All the Hexafluoroethane Hs Code are quality guaranteed. We are China Origin Factory of Hexafluoroethane Vapor Pressure. If you have any question, please feel free to contact us.

Product Categories : Semiconductor Process Materials > Hexafluoroethane

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