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Shandong Zhongshan Photoelectric Materials Co., Ltd
Model No.: Hexafluoroethane
Hexafluoroethane (C2F6), also known as perfluoroethane, is a kind of colorless, odorless, non-flammable inert gas. Its melting point is 100.6 ℃, boiling point is 78.2 ℃, slightly soluble in water. Due to its non-toxic, odorless and high stability, hexafluoroethane is widely used in the semiconductor manufacturing process. Hexafluoroethane, as a dry etchant, has the advantages of very small edge-side etching, high etching rate and high accuracy, which can meet the requirements of semiconductor manufacturing process for small linewidth.
Hexafluoroethane Quality Specification：
Application： Items 单位 Unit Indexs C2F6 Vol.% ≥99.999 O2+Ar Vol.ppm ＜1 N2 Vol.ppm ＜5 CO Vol.ppm ＜0.5 CO2 Vol.ppm ＜0.5 H2 Vol.ppm ＜0.5 Halohydrocarbon Vol.ppm ＜5 CH4 Vol.ppm ＜1 H2O Vol.ppm ＜2 Acidity（Measured by HF） Wt. ppm ＜0.1 Total impurity content Mol.ppm ≤10
Electronic grade hexafluoroethane is mainly used in the manufacturing process of semiconductor materials and semiconductor devices as etching agent and cleaning agent, as well as insulation gas and high dielectric strength coolant.
Packaging and storage：
Hexafluoroethane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.
Product Categories : Semiconductor Process Materials > Hexafluoroethane
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