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Shandong Zhongshan Photoelectric Materials Co., Ltd

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Nitrogen Trifluoride

Product categories of Nitrogen Trifluoride, we are specialized manufacturers from China, Nitrogen trifluoride price, nitrogen trifluoride market suppliers/factory, wholesale high-quality products of nitrogen trifluoride manufacturers R & D and manufacturing, we have the perfect after-sales service and technical support. Look forward to your cooperation!

China Nitrogen Trifluoride Suppliers

Nitrogen Trifluoride in the microelectronics industry is a kind of excellent plasma etching gas, which is cracked into active fluorine ion during the process of plasma etching. For the plasma etching of silicon and silicon nitride, using nitrogen trifluoride has higher etching rate and selectivity than using of Carbon Tetrafluoride or carbon tetrafluoride and oxygen mixed gas, especially in the process of etching integrated circuit material with the thickness of less than 1.5 μm, nitrogen trifluoride has excellent etching rate and selectivity, what's more, there is no pollution on the surface of etched material, it is also a good cleaning agent.



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