Semiconductor Manufacturing Material Octafluoropropane

$9999

≥100
Bag/Bags

Incoterm:

FOB,CIF,DDP

Min. Order:

100 Bag/Bags

Transportation:

Ocean

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Product Description

Product Attributes
Supply Ability & Additional Information
Packaging & Delivery

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Overview

Product Attributes

Model No.: Octafluoropropane

Supply Ability & Additional Information

Transportation: Ocean

Place of Origin: CHINA

Incoterm: FOB,CIF,DDP

Packaging & Delivery

Selling Units:: Bag/Bags

Product introduction

Octafluoropropane (C3F8) is a kind of colorless, odorless, non-flammable inert gas. Its melting point is 183.0 ℃, boiling point is 36.7 ℃, poorly soluble in water. Electronic grade octafluoropropane is used in semiconductor materials and Semiconductor Device Manufacturing. The mixture of octafluoropropane and oxygen is used as plasma etching material, which can selectively interact with the metal matrix of silicon wafer.

Quality specification

项目 Items	单位 Unit	指标 Indexs
C3F8	Vol.%	≥99.999	≥99.9995
O2+Ar	Vol.ppm	＜1	＜0.5
N2	Vol.ppm	＜5	＜1
CO	Vol.ppm	＜0.5	＜0.5
CO2	Vol.ppm	＜0.5	＜0.5
CF4	Vol.ppm	＜0.5	＜0.5
C2F6	Vol.ppm	＜0.5	＜0.5
CH4	Vol.ppm	＜1	＜1
H2O	Vol.ppm	＜1	＜1
酸度Acidity (Mesured by HF)	Wt. ppm	＜0.1	＜0.1
总杂质含量 Total impurity content	Mol.ppm	≤10	≤5

Application

In the semiconductor industry, octafluoropropane is used as plasma etching materials; In medicine, octafluoropropane can be used as a filler and contrast agent after vitreoretinal surgery. Octafluoropropane is also used as an ingredient in refrigerating mixtures.

Packaging and storage

Octafluoropropane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.

Product Categories : Semiconductor Process Materials > Octafluoropropane Semiconductor Process Materials

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