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Shandong Zhongshan Photoelectric Materials Co., Ltd

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HomeProductsSemiconductor Process MaterialsOctafluoropropaneSemiconductor Manufacturing Material Octafluoropropane

Semiconductor Manufacturing Material Octafluoropropane

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Overview
Product Attributes

Model No.Octafluoropropane

Supply Ability & Additional Informations

Place of OriginCHINA


Product introduction

Octafluoropropane (C3F8) is a kind of colorless, odorless, non-flammable inert gas. Its melting point is 183.0 ℃, boiling point is 36.7 ℃, poorly soluble in water. Electronic grade octafluoropropane is used in semiconductor materials and semiconductor device manufacturing. The mixture of octafluoropropane and oxygen is used as plasma etching material, which can selectively interact with the metal matrix of silicon wafer.

Quality specification

项目 Items 单位 Unit 指标 Indexs
C3F8 Vol.% ≥99.999 ≥99.9995
O2+Ar Vol.ppm <1 <0.5
N2 Vol.ppm <5 <1
CO Vol.ppm <0.5 <0.5
CO2 Vol.ppm <0.5 <0.5
CF4 Vol.ppm <0.5 <0.5
C2F6 Vol.ppm <0.5 <0.5
CH4 Vol.ppm <1 <1
H2O Vol.ppm <1 <1
酸度Acidity (Mesured by HF) Wt. ppm <0.1 <0.1
总杂质含量
Total impurity content
Mol.ppm ≤10 ≤5
Application

In the semiconductor industry, octafluoropropane is used as plasma etching materials; In medicine, octafluoropropane can be used as a filler and contrast agent after vitreoretinal surgery. Octafluoropropane is also used as an ingredient in refrigerating mixtures.


Packaging and storage

Octafluoropropane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.

Looking for ideal Semiconductor Material Electric Manufacturer & supplier ? We have a wide selection at great prices to help you get creative. All the Semiconductor Device Manufacturing are quality guaranteed. We are China Origin Factory of Etching Gas For Semiconductor. If you have any question, please feel free to contact us.

Product Categories : Semiconductor Process Materials > Octafluoropropane

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