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Shandong Zhongshan Photoelectric Materials Co., Ltd

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Shandong Zhongshan Photoelectric Materials Co., Ltd
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HomeProductsSemiconductor Process MaterialsPerfluorobutadieneEtching Materials For Electronic Circuits Perfluorobutadiene

Etching Materials For Electronic Circuits Perfluorobutadiene

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Product Attributes

Model No.Perfluorobutadiene

Supply Ability & Additional Informations

Place of OriginCHINA

Product introduction

Perfluorobutadiene (C4F6) is a kind of colorless, odorless, and water insoluble gas. Its melting point is 132.0 ℃, boiling point is 5.9 ℃. Perfluorobutadiene is a kind of conjugated olefins which contains six fluorine atoms and two carbon-carbon double bond, as a kind of excellent etching gas, because of its unique F/C ratio, perfluorobutadiene has higher etching selectivity, accuracy and aspect ratio than those of traditional perfluorinated saturated fluorocarbon etching gas, perfluorobutadiene can etch less than 100 nm even narrower electronic circuit. In addition, C4F6 has a higher selective ratio of photoresist and silicon nitride than that of C4F8, which can improve the etching stability, etching rate and uniformity, and thus improve the product quality.

Quality specification

Items Unit Index
C4F6 Vol.% ≥99.99
N2 Vol.ppm ≤10
O2+Ar Vol.ppm ≤2
H2O Vol.ppm ≤3
CO2 Vol.ppm ≤10
CO Vol.ppm ≤3
Isopropanol Vol.ppm ≤5
Other fluorocarbon Vol.ppm ≤70
(Measured by HF) Wt.ppm ≤2


Used as etching gas for plasma etching of semiconductor products.

Packaging and storage

Perfluorobutadiene is filled in steel cylinders with the model of B10, size of 14cm×83cm, internal volume of 10.1L, gross weight of 14.7kg, payload of 10kg. Packaging specifications can be customized according to customers' requirements.

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Product Categories : Semiconductor Process Materials > Perfluorobutadiene

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