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Shandong Zhongshan Photoelectric Materials Co., Ltd
Model No.: Perfluorobutadiene
Place of Origin: CHINA
Product introduction
Perfluorobutadiene (C4F6) is a kind of colorless, odorless, and water insoluble gas. Its melting point is 132.0 ℃, boiling point is 5.9 ℃. Perfluorobutadiene is a kind of conjugated olefins which contains six fluorine atoms and two carbon-carbon double bond, as a kind of excellent etching gas, because of its unique F/C ratio, perfluorobutadiene has higher etching selectivity, accuracy and aspect ratio than those of traditional perfluorinated saturated fluorocarbon etching gas, perfluorobutadiene can etch less than 100 nm even narrower electronic circuit. In addition, C4F6 has a higher selective ratio of photoresist and silicon nitride than that of C4F8, which can improve the etching stability, etching rate and uniformity, and thus improve the product quality.
Quality specification
| Items | Unit | Index |
| C4F6 | Vol.% | ≥99.99 |
| N2 | Vol.ppm | ≤10 |
| O2+Ar | Vol.ppm | ≤2 |
| H2O | Vol.ppm | ≤3 |
| CO2 | Vol.ppm | ≤10 |
| CO | Vol.ppm | ≤3 |
| Isopropanol | Vol.ppm | ≤5 |
| Other fluorocarbon | Vol.ppm | ≤70 |
| （Measured by HF） | Wt.ppm | ≤2 |
Application
Used as etching gas for plasma etching of semiconductor products.
Packaging and storage
Perfluorobutadiene is filled in steel cylinders with the model of B10, size of 14cm×83cm, internal volume of 10.1L, gross weight of 14.7kg, payload of 10kg. Packaging specifications can be customized according to customers' requirements.
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