Communicate with Supplier? Supplier
Edward Xu Mr. Edward Xu
What can I do for you?
Contact Supplier

Shandong Zhongshan Photoelectric Materials Co., Ltd

All
  • All
  • Title
Home > Products > Semiconductor Material > Perfluorobutadiene > Etching Materials For Electronic Circuits Perfluorobutadiene
Etching Materials For Electronic Circuits Perfluorobutadiene
  • Etching Materials For Electronic Circuits Perfluorobutadiene

Etching Materials For Electronic Circuits Perfluorobutadiene

Contact Now

Basic Info

Model No.: Perfluorobutadiene

Additional Info

Place of Origin: CHINA

Product Description

Product introduction

Perfluorobutadiene (C4F6) is a kind of colorless, odorless, and water insoluble gas. Its melting point is 132.0 ℃, boiling point is 5.9 ℃. Perfluorobutadiene is a kind of conjugated olefins which contains six fluorine atoms and two carbon-carbon double bond, as a kind of excellent etching gas, because of its unique F/C ratio, perfluorobutadiene has higher etching selectivity, accuracy and aspect ratio than those of traditional perfluorinated saturated fluorocarbon etching gas, perfluorobutadiene can etch less than 100 nm even narrower electronic circuit. In addition, C4F6 has a higher selective ratio of photoresist and silicon nitride than that of C4F8, which can improve the etching stability, etching rate and uniformity, and thus improve the product quality.

Quality specification

Items Unit Index
C4F6 Vol.% ≥99.99
N2 Vol.ppm ≤10
O2+Ar Vol.ppm ≤2
H2O Vol.ppm ≤3
CO2 Vol.ppm ≤10
CO Vol.ppm ≤3
Isopropanol Vol.ppm ≤5
Other fluorocarbon Vol.ppm ≤70
(Measured by HF) Wt.ppm ≤2

Application

Used as etching gas for plasma etching of semiconductor products.

Packaging and storage

Perfluorobutadiene is filled in steel cylinders with the model of B10, size of 14cm×83cm, internal volume of 10.1L, gross weight of 14.7kg, payload of 10kg. Packaging specifications can be customized according to customers' requirements.

Looking for ideal Gas Etch Process Manufacturer & supplier ? We have a wide selection at great prices to help you get creative. All the Semiconductor Etching Gas are quality guaranteed. We are China Origin Factory of Semiconductor materials Applications. If you have any question, please feel free to contact us.

Product Categories : Semiconductor Material > Perfluorobutadiene

Email to this supplier
  • Mr. Edward Xu
  • Your message must be between 20-8000 characters