Chlorine Trifluoride (ClF3) is a kind of corrosive, colorless, sweet-tasting gas with a molecular weight of 92.45, it turns green liquid when it is cooled, it is strong irritating and oxidizing even at low concentration. Chlorine trifluoride can ignite kinds of organic compounds and metals at high temperatures, ClF3 reacts violently with water and produce toxic substances through hydrolysis. In the semiconductor industry, chlorine trifluoride is used to clean chemical vapor deposition chamber. It can be used to remove semiconductor materials from the chamber wall without disassembly of the chamber. The chamber is heated enough to make semiconductor material decompose and react with ClF3 without activation of plasma.
| Items | Units | Index |
| Chlorine trifluorideis（ClF3）≥ | Vol.% | 99.9 |
| Oxygen（O2）≤ | ppm | 20 |
| Nitrogen（N2）≤ | ppm | 50 |
| Hydrogen sulfide（H2S）≤ | ppm | 700
|
Application In the semiconductor industry, chlorine trifluoride is used for cleaning chemical vapor deposition chambers, combustion agent, oxidant in the propellant, metal cutting oil at high temperature.
Packaging and storage
Chlorine trifluoride is stored in standard seamless cylinders, the packing specifications include 500g, 1kg, 2kg. Specific packaging specifications can be customized according to user requirements. Chlorine trifluoride is stored in shady, ventilated and dry storeroom away from fire and heat source. The storage area shall be equipped with equipment for emergency.
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