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Shandong Zhongshan Photoelectric Materials Co., Ltd

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Home > Products > Semiconductor Process Materials > Perfluorobutadiene


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Perfluorobutadiene is a kind of conjugated olefins which contains six fluorine atoms and two carbon-carbon double bond, as a kind of excellent etching gas, because of its unique F/C ratio, perfluorobutadiene has higher etching selectivity, accuracy and aspect ratio than those of traditional perfluorinated saturated fluorocarbon etching gas, perfluorobutadiene can etch less than 100 nm even narrower electronic circuit. In addition, C4F6 has a higher selective ratio of photoresist and silicon nitride than that of C4F8, which can improve the etching stability, etching rate and uniformity, and thus improve the product quality.



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