Hexafluoroethane (C2F6), also known as perfluoroethane, is a kind of colorless, odorless, non-flammable inert gas. Its melting point is 100.6 ℃, boiling point is 78.2 ℃, slightly soluble in water. Due to its non-toxic, odorless and high stability, hexafluoroethane is widely used in the semiconductor manufacturing process. Hexafluoroethane, as a dry etchant, has the advantages of very small edge-side etching, high etching rate and high accuracy, which can meet the requirements of semiconductor manufacturing process for small linewidth.
Quality specification
| Items | Unit | Indexs |
| C2F6 | Vol.% | ≥99.999 |
| O2+Ar | Vol.ppm | ＜1 |
| N2 | Vol.ppm | ＜5 |
| CO | Vol.ppm | ＜0.5 |
| CO2 | Vol.ppm | ＜0.5 |
| H2 | Vol.ppm | ＜0.5 |
| Halohydrocarbon | Vol.ppm | ＜5 |
| CH4 | Vol.ppm | ＜1 |
| H2O | Vol.ppm | ＜2 |
| Acidity（Measured by HF） | Wt.ppm | ＜0.1 |
| Total impurity content | Mol.ppm | ≤10 |
Application
Electronic grade hexafluoroethane is mainly used in the manufacturing process of semiconductor materials and semiconductor devices as etching agent and cleaning agent, as well as insulation gas and high dielectric strength coolant.
Packaging and storage
Hexafluoroethane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.
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