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Shandong Zhongshan Photoelectric Materials Co., Ltd

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Best Semiconductor Material For  Etching Gas
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Best Semiconductor Material For Etching Gas

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Basic Info

Model No.: Hexafluoroethane

Manufacturing Technology: Optoelectronic Semiconductor

Material: Element Semiconductor

Type: N-type Semiconductor

Package: SMD

Application: Refrigerator

Model: ST

Additional Info

Place of Origin: CN

Product Description

半导体材料Hexafluoroethane (C2F6), also known as perfluoroethane, is a kind of colorless, odorless, non-flammable inert gas. Its melting point is 100.6 ℃, boiling point is 78.2 ℃, slightly soluble in water. Due to its non-toxic, odorless and high stability, hexafluoroethane is widely used in the semiconductor manufacturing process. Hexafluoroethane, as a dry etchant, has the advantages of very small edge-side etching, high etching rate and high accuracy, which can meet the requirements of semiconductor manufacturing process for small linewidth.

半导体材料

Quality specification

Items

Unit

Indexs

C2F6

Vol.%

≥99.999

O2+Ar

Vol.ppm

<1

N2

Vol.ppm

<5

CO

Vol.ppm

<0.5

CO2

Vol.ppm

<0.5

H2

Vol.ppm

<0.5

Halohydrocarbon

Vol.ppm

<5

CH4

Vol.ppm

<1

H2O

Vol.ppm

<2

Acidity(Measured by HF)

Wt.ppm

<0.1

Total impurity content

Mol.ppm

≤10


Application

Electronic grade hexafluoroethane is mainly used in the manufacturing process of Semiconductor materials and semiconductor devices as etching agent and cleaning agent, as well as insulation gas and high dielectric strength coolant.

Packaging and storage

Hexafluoroethane is filled in clean and dry seamless cylinders with special treatment. The cylinder volumes are 4L, 8L, 10L, 12.5L and 40L etc. Packaging specifications can be customized according to customers' requirements.



萤石1

Shandong Zhongshan Photoelectric Materials Co., Ltd. is a high-tech enterprise invested and established by Shandong Zhongshan Group Co., Ltd., which integrates R&D, pilot test and industrialization. Zhongshan Photoelectric Materials Co., Ltd. has a research and development team of 200 people, mainly including professors, researchers, postdocs, doctors, masters and undergraduates. The company has made a number of innovative technological achievements after several years of development. More than 50 patents have been applied, and 30 patents for invention have been authorized in recent 3 years.

The company build a 5,000m2 R&D pilot platform, including a number of complete supporting facilities and advanced function of test and pilot devices, such as High Pure Fluorine gas, special functional fluorinated carbon materials, semiconductor materials(high pure electronic gas/ electronic chemicals), high specific energy battery, Lithium Battery electrolytes and additives, thermal battery and related materials, photoelectric materials, stable isotope and its derivative materials, fluoridated biomedical materials, etc. The company can carry out a number of innovative research and development tests and pilot for related areas of new materials and equipments. The company has established an advanced analysis and testing center for R&D and production of all the projects.

At the same time, the company has built the first large-scale production line of fluorographene and functional fluorocarbon material performance evaluation laboratory all over the world, and has become the only manufacturer that can mass-produce and supply high-quality fluorographene at home and abroad up to now.


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Product Categories : Semiconductor Material > Hexafluoroethane

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