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Molybdenum Hexafluoride

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Molybdenum Hexafluoride (MoF6) is a kind of white blocky crystal at low temperature, its relative molecular weight is 209.93, melting point is 17.5℃ and boiling point is 35℃, it is sensitive to wet air. It is used in the electronic industry for chemical vapor deposition of molybdenum silicide or molybdenum, in order to produce interconnects and grid electrode with low resistance and high melting point. 
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